Radio-Frequency Cantilevers for Scanning Probe Microscopy
نویسندگان
چکیده
We are fabricating radio-frequency silicon nitride cantilevers for the use in scanning probe microscopy. These cantilevers will be used to study dielectric fluctuations above thin polymers films and charging behavior in organic field-effect transistors. Further, we have fabricated doublyclamped cantilevers of similar dimension and constituency and employed a magnetomotive scheme to measure their frequencies (~ 5 MHz) and quality factors (~ 70’000).
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